Microstructure of PZT films deposited by Inductively Coupled Plasma Assisted Aerosol Deposition Method
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چکیده
منابع مشابه
Texture and microstructure of Cr2O3 and (Cr,Al)2O3 thin films deposited by reactive inductively coupled plasma magnetron sputtering
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ژورنال
عنوان ژورنال: Transactions of the Materials Research Society of Japan
سال: 2008
ISSN: 1382-3469,2188-1650
DOI: 10.14723/tmrsj.33.1239